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Inspection system for semiconductors industry

NanoFocus AG, a developer and manufacturer of optical 3D surface measuring technology, has introduced the new measuring system µsprint hp-opc 3000 for the optical inspection of probe cards. The system’s process is designed for the requirements of wafer test locations with a variety of different probe cards as well as large-volume throughput. The system is responsible for ensuring the wafers are in sound condition after testing in order to reduce yield losses, as well as minimise the time and number of complex maintenance cycles the probe cards are subjected to on a regular basis.

The product is a process-capable capacity tool. It can be integrated into process control systems via a SECS/GEM communication interface. The tool complies with all necessary and common standards required at front-end wafer test locations.

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